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Additional resources for Advances in Chemical Physics, Vol. 77
Properties of the processing techniques become increasingly critical. ge and contamination, and molecular scale selectivity and controllability are essential. The use of radiation-induced chemistry is desirable if it can be conducted at lower temperatures and with smaller levels of damage and contamination than particle impact and thermal methods. Radiation from synchrotron sources has seve ral attractive features in this regard. The short wavelengths provide high spatial resolution in resist and lithography applications and are not absorbed significantly by some surface contaminants.
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